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Shkel, Anton; Barekatain, Matin (, Technical digest - Solid-State Sensor, Actuator, and Microsystems Workshop)This paper describes an integrated circuit (IC) authentication and tamper detection system, based on a Film Bulk Acoustic Resonator (FBAR) and passive Radio-Frequency Identification (RFID), which allows for wireless detection of tampering or counterfeiting in packaged ICs. We demonstrate the concept through the use of a 2.6 GHz FBAR based on a Zinc Oxide (ZnO) thin film. The FBAR is series connected to a piezoelectric energy harvester, which can generate voltage pulses with a peak amplitude of 56 V when tampering activity is detected. Our measurements validate this concept and demonstrate that we can permanently alter the high frequency resonance characteristics of the FBAR through dielectric breakdown caused by tampering.more » « less
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